Tech Talk : Systems Based on Ultrasonic MEMS: Commercialization and Future Directions

Room: Conference Hall, Bldg: Building 5, 147 South Bedford Street, Burlington, Massachusetts, United States, 01803

Abstract: The increasing maturity of thin-film piezoelectric materials and the MEMS manufacturing ecosystem has enabled the rapid development of sensor systems based on piezoelectric micromachined ultrasonic transducers (PMUTs). In this talk, I will describe work by my research group over the last decade to develop and commercialize PMUT-based systems for consumer electronics applications, starting with air-coupled PMUTs used for time-of-flight (ToF) range-finding and human presence sensing. These ToF sensors were commercialized by my startup, Chirp Microsystems (now part of TDK), and are used today in various products such as smart-locks, robot vacuum cleaners, and laptops. We subsequently developed an ultrasonic fingerprint sensor based on the monolithic integration of PMUTs with CMOS that is used for biometric authentication in consumer products today. A common feature of the ToF sensor and the fingerprint sensor is that they are systems that combine MEMS, integrated circuits, and algorithms. The ability to realize a complete ultrasonic system on chip (SoC) opens new research opportunities in areas such as portable medical imaging systems for point-of care ultrasound (POCUS) as well as wearable ultrasonic devices. Co-sponsored by: IEEE Boston Section Agenda: Agenda: 6 - 6:45pm: Networking Dinner 6:45pm - 7:45pm: Tech Talk Room: Conference Hall, Bldg: Building 5, 147 South Bedford Street, Burlington, Massachusetts, United States, 01803

CT ExComm March 2024 Meeting

Room: Robotics Room, 1740 Randolph Road, Middletown, Connecticut, United States, 06457, Virtual: https://events.vtools.ieee.org/m/409929

Section Activities Agenda: Review Secretary and Treasury reports Discuss Affinity Group Activities - Consultant Networks, WIE, YP and PACE Review technical society activities - AP/MTT/UFFC, ComSoc/SP, Computyer/SMC, PES, PELS Review committee activities - Membership, Entrepreneur Society, Industry Liason, Student Activities Old Business New Business Room: Robotics Room, 1740 Randolph Road, Middletown, Connecticut, United States, 06457, Virtual: https://events.vtools.ieee.org/m/409929